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Material Transport System

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Electronics

 

Installation in a front end wafer fab in Europe

Automated material transport system is not only for 300mm fab. IntelliTrack for Semiconductor carriers is a highly reliable yet affordable automation solution suitable for new 300mm Fab as well as retrofitting of existing 200mm or 150mm fab. Special features of Intellitrack such as low profile and light weight make it possible to integrate into older low ceiling fabs. 

 

Click here to view IntelliTrack for Hard Drive Media →

 

IntelliTrack™ Conveyor for the Semiconductor industry is a highly affordable Class 1 (Fed Std 209E) conveyor system. System components are available for nearly all types of wafer carriers. It consists of the following hardware and controller. Direct interface with tool front load port is also available.

The linear conveyor provides no contact, slip-free motion of carriers through its use of independently controlled drive motors. Each transport section is independently driven and controlled, enabling accumulation and asynchronous motion without the need for a slip drive system. All of the functionality is performed by a built-in controller hence no external controller is required. An exclusive feature of the IntelliTrack Conveyor System is its uniquely simple and flexible control scheme.

Main benefits:

  • Class 1 cleanliness available

  • Simple design

  • High reliability and availability

  • System easy expandability

  • Extensive automation integration capabilities compliance with SEMI E84, SECS II according SEMI E4, E5, E30, E37

  • Easy to install and to integrate

  • Easy to combine with other AMH-systems

  • Remarkably competitive prices

  • IntelliMove software package enables SEMI-E82 compliant transport system. High level intelligence, such as route optimization, conflict resolution etc, is build-in with this software package that together makes Stratus conveyor solution truly a remarkable gem of semiconductor AMHS world.

IntelliMove - Transport System Controller software

 

To provide truly anywhere-to-anywhere, just in time and smart material delivery and routing solution, Stratus offers an unique off the shelf Transport System Controller (TSC) software called IntelliMove. This fully SEMI compliant TSC provide unparalleled flexibilities in system configurations, future expansion &  tool upgrades/relocation. It offers full suites of hardware simulation & emulation capabilities, real time carrier tracking & reporting, intelligent anomaly recovery with automatic problem identifications and resolutions, extensive in-system diagnostic functions & much more! Please click here to visit the homepage of IntelliMove.

 

Fully Automated Wafer Carrier Transport System  
Application for SMIF, FOUP, Reticle Pod, FOSB, Open Cassette, Single wafer carriers

 

Hybrid System Working Together with Overhead Hoist Vehicle System  
Together with Murata Machinery of Japan, Stratus has installed numerous Hybrid transport systems for 300mm fabs using FOUPs from multiple vendors. Hybrid system takes advantage of High Throughput of conveyor system along with overhead storage and direct loading capability of OHT.

 

Buffer System / Local Tool Buffers  
Another example of hybrid transport system, specifically used as overhead local buffering system for tools nearby.

 

  

 

 

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