IntelliMove Transport System Controller (TSC)
- Transport System Controller (TSC) software called IntelliMove
- Just in time and smart material delivery and routing solution
- Fully SEMI E82 compliant
- Flexibilities in system configurations, future expansion & tool upgrades/relocation.
- Full suites of hardware simulation & emulation capabilities
- Real time carrier tracking & reporting, intelligent anomaly recovery with automatic problem identifications and resolutions, extensive in-system diagnostic functions & much more!
IntelliStock Stocker Controller
- Absolute Encoder Servo System
- Even in the event of Power Blackout or E-Stop, recovery does not require Homing
- Fully Compliant with SEMI E88 (Stocker SEM)
- Configurable I/O Port (Std I/F is SEMI E84 Compliant)
- User Friendly US Developed Software (IntelliStock)
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