SOLUTIONS

  • Automated material transport system is not only for 300mm wafer fab. IntelliTrack is also highly reliable yet affordable automation solution suitable for existing 200mm or 150mm fab as well as solar, and medical industries. Special features of Intellitrack such as low profile and light weight make it possible to integrate into older low ceiling fabs.
  • IntelliTrack™ Conveyor is Class 1 (Fed Std 209E), CE and SEMI Std. certified conveyor system. System components are available for nearly all types of wafer carriers. Hybrid transport system with direct interface with tool front load port is also available.
  • Our Expertise   

            • Material Transport and Control
            • Ultra-Clean System
            • Automated Material Loading
            • Vision System Integration
            • Robotics and Motion Control

 

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